FS-Pro is an All-In-One Semiconductor Parameter Analyzer,
effectively integrating high precision IV, CV, pulse IV,
transient IV sampling and 1/f low frequency noise test in a
compact machine. All device low frequency characteristics
can be measured in FS-Pro. The powerful testing and
analysis functionality accelerate device research and
process evaluation greatly.
FS-Pro has a wide range of applications on semiconductor devices, LED materials, two-dimensional materials, nanomaterial and novel devices. Build-in software LabExpress buid in hundreds of presets and friendly GUI which offers a plug and play using experience.
FS-Pro can be used in conjunction with the Primarius low frequency noise measurement system that significantly improves noise testing efficiency and throughput. The system supports modular architecture to keep compact size and future extensibility. It also supports parallel measurement, which improves the measurement efficiency significantly.
FS-Pro has received widespread attention and recognition
due to its comprehensive testing functionality, the system
has been adopted not only by leading design companies,
foundries and IDMs, but also many world-class universities
and academic research.
High precision IV, CV,pulse IV and transient IV sampling and 1/f noise test all in one box
Providing complete low-frequency parametric characterizations without switching cables or probe connections.
Wide Range and High Precision
High speed sampling time domain signal acquisition
Modular architect enables flexible test configurations, compact size and future extensibility.
Easy to Use
Build-in software LabExpressTM offers intuitive GUI and supports powerful measurement and analysis function, it can generate any voltage synchronous and follow waveform without complicated programming.
As 9812DX's internal SMU module
Seamlessly integrated with 9812D/DX system and NoiseProPlus software, providing significant testing speed improvement.
Semiconductor device characterization
Optoelectronic devices and MEMS measurement
Advanced Materials and Devices measurement
Non-destructive measurement and inspection
Ultra-low frequency noise measurement
LabEXpress offers intuitive GUI and supports powerful measurement and analysis function
Completed DC IV, pulse IV, transient IV sampling, CV, and 1/f noise measurement function
Build-in device types like MOSFET，BJT，diode， resistor，capacitor and offer plenty of measurement presets for user to perform test job easily
Data analysis features such as curve conversion and plotting makes device characterization analysis right in time
Support multiple data output format for further study, the data could load into modeling software such as BSIMProPlus and MeQLab for model extraction
Professional version LabExpress could control semi-auto probe station, switching matrix for wafer mapping and testing automation, and its parallel testing functionality could improve testing efficiency significantly
DC IV:±200V/1A bias range, maximum 20W output power, minimum 30fA current measurement accuracy, 30uV voltage measurement accuracy, 4 quadrants operation
CV:Build-in CV: ±200V DC bias range，maximum 10kHz bandwidth 20fF~1mF measurement range external LCR:±40V DC bias range，40Hz~5MHz bandwidth 100fF~10mF measurement range
Pulse IV:±200V/3A bias range，maximum 480W output power， minimum 5pA current measurement accuracy，30uV voltage measurement accuracy，minimum pulse width 50us
Transient IV:Sampling Arbitrary waveform output，maximum sample rate 1.8MS/s， minimum 10us time step
1/f Noise:Standard 100kHz bandwidth，minimum frequency resolution 1mHz, measures down to 2e-28A2⁄ /Hz and <10s/bias，support RTN DUT min impedance: 500Ω