Introduction

FS-Pro is an All-In-One Semiconductor Parameter Analyzer, effectively integrating high precision IV, CV, pulse IV, transient IV sampling and 1/f low frequency noise test in a compact machine. All device low frequency characteristics can be measured in FS-Pro. The powerful testing and analysis functionality accelerate device research and process evaluation greatly.   

FS-Pro has a wide range of applications on semiconductor devices, LED materials, two-dimensional materials, nanomaterial and novel devices. Build-in software LabExpress buid in hundreds of presets and friendly GUI which offers a plug and play using experience. 

FS-Pro can be used in conjunction with the Primarius low frequency noise measurement system that significantly improves noise testing efficiency and throughput. The system supports modular architecture to keep compact size and future extensibility. It also supports parallel measurement, which improves the measurement efficiency significantly. 

FS-Pro has received widespread attention and recognition due to its comprehensive testing functionality, the system has been adopted not only by leading design companies, foundries and IDMs, but also many world-class universities and academic research.  

Key Advantage

All-In-One 

High precision IV, CV,pulse IV and transient IV sampling and 1/f noise test all in one box 

Providing complete low-frequency parametric characterizations without switching cables or probe connections. 

Wide Range and High Precision 

High speed sampling time domain signal acquisition 

Modular Architect 

Modular architect enables flexible test configurations, compact size and future extensibility.

Easy to Use 

Build-in software LabExpressTM offers intuitive GUI and supports powerful measurement and analysis function, it can generate any voltage synchronous and follow waveform without complicated programming.

As 9812DX's internal SMU module 

Seamlessly integrated with 9812D/DX system and NoiseProPlus software, providing significant testing speed improvement.  

Applications

Semiconductor device characterization 

Optoelectronic devices and MEMS measurement 

Advanced Materials and Devices measurement

Non-destructive measurement and inspection 

Ultra-low frequency noise measurement

Software Specifications

LabEXpress offers intuitive GUI and supports powerful measurement and analysis function 

Completed DC IV, pulse IV, transient IV sampling, CV, and 1/f noise measurement function

Build-in device types like MOSFET，BJT，diode， resistor，capacitor and offer plenty of measurement presets for user to perform test job easily 

Data analysis features such as curve conversion and plotting makes device characterization analysis right in time 

Support multiple data output format for further study, the data could load into modeling software such as BSIMProPlus and MeQLab for model extraction 

Professional version LabExpress could control semi-auto probe station, switching matrix for wafer mapping and testing automation, and its parallel testing functionality could improve testing efficiency significantly 

Hardware Specifications

DC IV:±200V/1A bias range, maximum 20W output power, minimum 30fA current measurement accuracy, 30uV voltage measurement accuracy, 4 quadrants operation 

CV:Build-in CV: ±200V DC bias range，maximum 10kHz bandwidth 20fF~1mF measurement range external LCR:±40V DC bias range，40Hz~5MHz bandwidth 100fF~10mF measurement range 

Pulse IV:±200V/3A bias range，maximum 480W output power， minimum 5pA current measurement accuracy，30uV voltage measurement accuracy，minimum pulse width 50us 

Transient IV:Sampling Arbitrary waveform output，maximum sample rate 1.8MS/s， minimum 10us time step 

1/f Noise:Standard 100kHz bandwidth，minimum frequency resolution 1mHz, measures down to 2e-28A2⁄ /Hz and <10s/bias，support RTN DUT min impedance: 500Ω  

 Application Example